氢气稀释比例对多晶硅薄膜微观结构和沉积特性的影响
宋莎莎，左 潇，魏 钰，陈龙威，舒兴胜
Insights into the deposition rate and microstructure of polysilicon films: effect of different hydrogen dilution ratio
SONG Sha-sha, ZUO Xiao, WEI Yu, CHEN Long-wei, SHU Xing-sheng
核聚变与等离子体物理
.
2014, (3): 275
-281
.
