装置器壁烘烤出气与辉光放电清洗出气研究

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王志文，韦卫星，赵元庆，何燕和，廖义奎

Study on out-gassing by baking and glow discharge during wall conditioning of vacuum chamber

WANG Zhi-wen, WEI Wei-xing, ZHAO Yuan-qing, HE Yan-he, LIAO Yi-kui

核聚变与等离子体物理 . 2007, (1): 77 -80 .