微波电子回旋共振等离子体阴极电子束的实验研究

doi:10.16568/j.0254-6086.201901004

核聚变与等离子体物理 ›› 2019, Vol. 39 ›› Issue (1): 21-27.DOI: 10.16568/j.0254-6086.201901004

微波电子回旋共振等离子体阴极电子束的实验研究

李亮1-4，刘亦飞1, 4，陈龙威3，王功1, 4，刘鸣1, 2, 4，任兆杏3，刘兵山*1, 4，赵光恒1, 5

(1. 中国科学院空间应用工程与技术中心，北京 100094； 2. 中国科学院大学，北京 100049； 3. 中国科学院等离子体物理研究所，合肥 230031； 4. 中国科学院太空制造技术重点实验室，北京 100094； 5. 中国科学院太空应用重点实验室，北京 100094)

出版日期:2019-03-15 发布日期:2019-03-13
作者简介:李亮(1989-)，男，陕西西安人，博士研究生，从事电子束源系统的研究。
基金资助:
国家自然科学基金(11575252，11775270)；安徽省自然科学基金(1708085MA26)；辽宁省自然科学基金 (20170540571)

Experimental study of electron beam based on microwave electron cyclotron resonance plasma cathode

LI Liang1-4, LIU Yi-fei1, 4, CHEN Long-wei3, WANG Gong1, 4, LIU Ming1, 2, 4, REN Zhao-xing3, LIU Bing-shan1, 4, ZHAO Guang-heng1, 5

(1. Technology and engineering center for space utilization, Chinese Academy of Sciences, Beijing 100094; 2. University of Chinese Academy of Sciences, Beijing 100049; 3. Institute of plasma physics, Chinese Academy of Sciences, Hefei 230031; 4. Key Laboratory of Space Manufacturing Technology, Chinese Academy of Sciences, Beijing 100094; 5. Key Laboratory of Space Utilization, Chinese Academy of Sciences, Beijing 100094)

Online:2019-03-15 Published:2019-03-13

摘要/Abstract

摘要：

介绍了实验室研制的微波电子回旋共振(ECR)等离子体阴极电子束系统及初步研究结果，该系统包括微波ECR 等离子体源、电子束引出极、聚焦线圈等。通过测量水冷靶电流和靶上的束斑尺寸，实验研究了微波ECR 等离子体阴极电子束的流强、聚束性能等随电子束系统工作条件的变化。结果表明：微波输入功率越高、引出电压越高，引出电子束流强越大；工作气压对电子束流强的影响较复杂，随气压增加呈现出先降低后升高的特点；在7×10⁻⁴Pa 的极低气压下电子束流强可达75mA，引出电压9kV；能量利用率可达0.6；调整聚焦线圈的驱动电流，电子束的束斑直径从20mm 减小到13mm，电子束流强未有明显变化。

关键词: 微波回旋共振, 等离子体阴极, 电子束

Abstract:

The generation and control of microwave electron cyclotron resonance (ECR) plasma cathode electron beam is studied experimentally. A complete set of discharge, electron beam extraction, focusing and measuring system was set up. The characteristics and performance of microwave ECR plasmas as electron beam extraction source were studied by measuring the current of water cooling target and the beam spot size on the target. Experimental results indicated that both microwave input power and accelerating voltage are conducive to improving electron beam current. The influence of gas pressure on the electron beam current was complex. With the increase of gas pressure, the electron beam current is characterized by decreasing first and then increasing. The extracted electron current of microwave ECR plasma cathode can reach 75mA at gas pressure of 7×10⁻⁴Pa, and the energy of the electron beam can reach 9keV. The energy utilization can reach 0.6. By adjusting the current of the focusing coil, the diameter of electron beam spot is reduced from 20mm to 13mm and the electron beam current keeps the value unchanged.

Key words: Microwave electron cyclotron resonance, Plasma cathode, Electron beam

中图分类号:

O461.2

李亮, 刘亦飞, 陈龙威, 王功, 刘鸣, 任兆杏, 刘兵山, 赵光恒. 微波电子回旋共振等离子体阴极电子束的实验研究[J]. 核聚变与等离子体物理, 2019, 39(1): 21-27.

LI Liang, LIU Yi-fei, CHEN Long-wei, WANG Gong, LIU Ming, REN Zhao-xing, LIU Bing-shan, ZHAO Guang-heng. Experimental study of electron beam based on microwave electron cyclotron resonance plasma cathode[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2019, 39(1): 21-27.

参考文献

[1] Osipov I, Rempe N. A plasma-cathode electron source designed for industrial use [J]. Rev. Sci. Instrum., 2000,71(4): 1638-1641.
[2] Hirt L, Reiser A, Spolenak R, et al. Additive manufacturing of metal structures at the micrometer scale[J]. Advanced Materials, 2017, 29(17): 1604211.
[3] Galchenko N K, Kolesnikova K A, Semenov G V, et al.Application of electron beam equipment based on a plasma cathode gun in additive technology [C]. AIP Publishing LLC, 2016. 020059.
[4] Pedrini D, Albertoni R, Paganucci F, et al. Modeling of LaB6 hollow cathode performance and lifetime [C]. 64thInternational Astronautical Congress, 2015. 170-178.
[5] Ozur G E, Proskurovsky D I, Rotshtein V P, et al.Production and application of low-energy, high-current electron, beams [J]. Laser & Particle Beams, 2003, 21(2):157-174.
[6] Oks E M. Plasma cathode electron sources: physics,technology, applications [M]. Wiley VCH, 2006.
[7] Dan M G, Katz I. Fundamentals of electric propulsion:ion and hall thrusters [M]. California: John Wiley & Sons,Inc., 2008.
[8] Kornilov S Y, Osipov I V, Rempe N G. Generation of narrow focused beams in a plasma-cathode electron gun
[J]. Instruments & Experimental Techniques, 2009, 52(3):406-411.
[9] Oks E M, Schanin P M. Development of plasma cathode electron guns [J]. Phys. Plasmas, 1999, 6(5): 1649-1654.
[10] Zhirkov I S, Burdovitsin V A, Oks E M, et al. Formation of narrow-focused electron beams generated by a source with a plasma cathode in the forevacuum pressure range[J]. Technical Physics, 2006, 51(6): 786-790.
[11] Muhl S, Pérez A. The use of hollow cathodes in deposition processes: a critical review [J]. Thin Solid Films, 2015, 579: 174-198.
[12] Cothran C D, Boris D R, Compton C S, et al. Continuous and pulsed electron beam production from an uninterrupted plasma cathode [J]. Surface & Coatings Technology, 2015, 267: 111-116.
[13] 张连珠, 傅凤清, 王增波, 等. 氮气空心阴极辉光放电等离子体离子的蒙特卡罗模拟研究 [J]. 核聚变与等离子体物理, 2006, 26(2): 135-139.
[14] Vizir A, Gushenets V, Nikolaev A, et al. Recent development and applications of electron, ion and plasma sources based on vacuum arc and low pressure glow [C].The IEEE International Conference on Plasma Science,2004. Icops 2004. IEEE Conference Record. IEEE Xplore, 2004. 286.
[15] Oks E M. Physics and technique of plasma electron sources [J]. Plasma Sources Science & Technology, 1992,1(4): 249.
[16] Manheimer W M, Fernsler R F, Gitlin M S. High power,fast, microwave components based on beam generated plasmas [J]. IEEE Transactions on Plasma Science, 2002,26(5): 1543-1555.
[17] Xu J, Tian X, Gong C, et al. A plasma electron source for generating beam plasma at low gas pressures [J]. Vacuum,2017, 143: 407-411.
[18] Vizir A V, Oks E M, Shandrikov M V, et al. A bulk plasma generator based on a plasma cathode discharge [J].Instruments & Experimental Techniques, 2003, 46(3):384-387.
[19] Pozo S D, Ribton C N, Smith D R. A novel RF excited plasma cathode electron beam gun design [J]. IEEE Transactions on Electron Devices, 2014, 61(6):1890-1894.
[20] Longmier B, Hershkowitz N. "Electrodeless" plasma cathode for neutralization of ion thrusters [C]. AIAA 2005?3856, 41st Joint Propulsion Conference & Exhibit, Tucson, Arizona1, 2005.
[21] Goebel D M, Watkins R M. High current, low pressure plasma cathode electron gun [J]. Rev. Sci. Instrum., 2000,71(2): 388-398.
[22] Longmier B, Hershkowitz N. Improved operation of the nonambipolar electron source [J]. Rev. Sci. Instrum.,2008, 79(9): 113504-61.
[23] 刘明海, 胡希伟, 吴汉明. ECR 等离子体源中基本参数的数值模拟 [J]. 核聚变与等离子体物理, 1998, 18(2):36-40.
[24] 杨涓, 冯冰冰, 罗立涛, 等. 氩气和氪气作为ECR 中和器工质的性能比较 [J]. 高电压技术, 2015, 41(9):2850-2855.
[25] Light M, Madziwa-Nussinov T G, Colestock P, et al.Electron beam generation by an electron cyclotron resonance plasma [J]. IEEE Transactions on Plasma Science, 2009, 37(2): 317-326.
[26] Manheimer W M, Fernsler R, Lampe M, et al.Theoretical overview of the large area plasma processing system (LAPPS) [C]. IEEE International Conference on Plasma Science, 2000. Icops 2000. IEEE Conference Record. IEEE Xplore, 2000. 151.
[27] Weatherford B R, Foster J E, Kamhawi H. Electron current extraction from a permanent magnet waveguide plasma cathode [J]. Rev. Sci. Instrum., 2011, 82(9):093507.
[28] Takao Y, Hiramoto K, Nakagawa Y, et al. Electron extraction mechanisms of a micro ECR neutralizer [J].Japanese Journal of Applied Physics, 2016, 55(7S2):07LD09.

微波电子回旋共振等离子体阴极电子束的实验研究

Experimental study of electron beam based on microwave electron cyclotron resonance plasma cathode

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