容性耦合电负性氧等离子体的激光诱导光致剥离技术诊断研究

doi:10.16568/j.0254-6086.201701007

核聚变与等离子体物理 ›› 2017, Vol. 37 ›› Issue (1): 37-42.DOI: 10.16568/j.0254-6086.201701007

容性耦合电负性氧等离子体的激光诱导光致剥离技术诊断研究

王涛，王俊，唐成双，杨郁，辛煜

(苏州大学物理与光电?能源学部，苏州 215006)

收稿日期:2016-01-13 修回日期:2016-08-02 出版日期:2017-03-15 发布日期:2017-03-15
作者简介:王涛(1991-)，男，安徽阜阳人，硕士，从事低温等离子体物诊断研究。
基金资助:
国家自然科学基金(11175127)

Study on diagnosis of pulsed laser induced photo-detachment technique for capacitively coupled negative O2 plasma

WANG Tao, WANG Jun, TANG Cheng-shuang, YANG Yu, XIN Yu

(College of Physics, Optoelectronics and Energy, Soochow University, Suzhou 215006)

Received:2016-01-13 Revised:2016-08-02 Online:2017-03-15 Published:2017-03-15

摘要/Abstract

摘要：

采用波长532nm的高能脉冲激光束照射40.68MHz激发的容性耦合氧等离子体，并给处于激光束中央的探针施加一定的正偏压，由此诊断氧等离子体的空间电位和电负度。实验结果表明，探针偏压从0V逐渐增加时，探针搜集的电流波形从V型向倒U型转变，转变电压点正是电负性等离子体的空间电位。尝试着给出了运用激光诱导光致剥离技术诊断电负性等离子体空间电位的经验方法。另外，探针上施加的正偏压高于等离子体空间电位时，等离子体的电负度基本保持不变。实验还表明，氧等离子体的电负度随着射频输入功率的增加而呈现下降的趋势。

关键词: 激光诱导光致剥离, 电负性等离子体, 空间电位, 电负度

Abstract:

A high energy pulsed laser beam with wavelength of 532nm was applied to irradiate the capacitively coupled O2 plasma driven by 40.68MHz. Spatial potential of the plasma and electro negativity are diagnosed by exerting a certain positive bias on the probe aligned with laser beam at the center. The experimental results show that a transition of signal wave shape on the probe occurs from V-shaped to invert U-shaped as increasing positive bias. The transition voltage point is just the spatial potential of electronegative plasma. An empirical method was given to obtain the spatial potential of negative plasma by using LIPD technique. Additionally, plasma electro negativity keeps a constant basically as increasing positive bias beyond the plasma spatial potential. The experiments still show a trend of decrease in electro negativity of O2 plasma with increasing RF input power.

Key words: Laser induced photo detachment, Electronegative plasma, Plasma spatial potential, Electro negativity

中图分类号:

王涛，王俊，唐成双，杨郁，辛煜. 容性耦合电负性氧等离子体的激光诱导光致剥离技术诊断研究[J]. 核聚变与等离子体物理, 2017, 37(1): 37-42.

WANG Tao, WANG Jun, TANG Cheng-shuang, YANG Yu, XIN Yu. Study on diagnosis of pulsed laser induced photo-detachment technique for capacitively coupled negative O2 plasma[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2017, 37(1): 37-42.

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容性耦合电负性氧等离子体的激光诱导光致剥离技术诊断研究

Study on diagnosis of pulsed laser induced photo-detachment technique for capacitively coupled negative O2 plasma

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