螺旋波诱导氢等离子体的密度跳跃研究

核聚变与等离子体物理 ›› 2012, Vol. 32 ›› Issue (1): 87-91.

螺旋波诱导氢等离子体的密度跳跃研究

姜帆1，吴卫东2，高映雪3，戴阳3，王瑜英2，程新路1，熊政伟1

(1. 四川大学原子与分子物理研究所，成都 610065；2. 中国工程物理研究院，激光聚变研究中心，绵阳 621900；3. 西南科技大学理学院，绵阳 621010)

收稿日期:2011-06-02 修回日期:2011-09-08 出版日期:2012-03-15 发布日期:2012-03-14
作者简介:姜帆(1986-)，女，河南安阳人，硕士研究生，从事低温等离子体诊断方向的研究。
基金资助:
中国工程物理研究院重大基金项目(2005Z0805)

Study of density jump in helicon-wave induced H2 plasma

JIANG Fan1, WU Wei-dong2, GAO Ying-xue3, DAI Yang3, WANG Yu-ying2, CHENG Xin-lu1, XIONG Zheng-wei1

(1. Institute of Atomic and Molecular Physics, Sichuan University, Chengdu 610065; 2. Research Center of Laser Fusion, CAEP, Mianyang 621900; 3. College of Science, Southwest University of Science and Technology, Mianyang 621010.)

Received:2011-06-02 Revised:2011-09-08 Online:2012-03-15 Published:2012-03-14

摘要/Abstract

摘要：

采用Langmuir探针方法对氢等离子体中电子密度和电子能量概率函数随射频功率的变化进行研究，发现电子密度在射频功率增加过程中出现两次跳跃。通过发射光谱法测得氢等离子体H_α、H_β和H_γ三条谱线强度比值的变化，进一步验证了密度跳跃现象。该现象说明氢等离子体的放电模式发生了从电感耦合到电容耦合再到螺旋波模式的转变。从电子与氢分子的相互作用和Nagoya type Ⅲ型(N-型)天线电场耦合作用两方面解释密度跳跃现象。随着输入功率的增加，电子与氢分子相互作用增强，使电子密度发生跃变；当天线横向电场E_y取最大值，螺旋波轴向波矢k_z分别为π/l_a和3π/l_a时天线与等离子体耦合最好，分别产生两次密度跳跃。

关键词: 螺旋波等离子体, 电子密度, 放电模式转变, 密度跳跃, 天线耦合

Abstract:

Hydrogen plasmas electron density and electron energy distribution function EEDF were studied with Langmuir probe. Two jumps were observed in the variation of the electron density with the radio frequency power. The relative intensity ratio of hydrogen plasmas spectrum line H_α, H_β and H_γ validated this phenomenon. Two density jumps illuminated the transition of discharge mode, which labeled as capacitive, inductive and helicon-wave mode. In this work, the density jumps are explained from two sides, one is the interaction between electrons and hydrogen molecules, the other is Nagoya type Ⅲ (N-type) antenna-plasma coupling. With the increase of radiofrequency power, the interaction between electron and hydrogen molecule has been enhanced which causes the electron density jumps. The antenna couples well to plasmas when transverse field E_y is maximum, and the wave vector of k_z locates at π/l_a or 3π/l_a, corresponding to the first and second density jump.

Key words: Helicon-wave plasma, Electron density, Discharge mode transition, Density jump, Antenna coupling

中图分类号:

O539

姜帆1，吴卫东2，高映雪3，戴阳3，王瑜英2，程新路1，熊政伟1. 螺旋波诱导氢等离子体的密度跳跃研究[J]. 核聚变与等离子体物理, 2012, 32(1): 87-91.

JIANG Fan1, WU Wei-dong2, GAO Ying-xue3, DAI Yang3, WANG Yu-ying2, CHENG Xin-lu1. Study of density jump in helicon-wave induced H2 plasma[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2012, 32(1): 87-91.

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