内表面沉积的类金刚石薄膜的喇曼光谱表征

核聚变与等离子体物理 ›› 2009, Vol. 29 ›› Issue (1): 82-86.

内表面沉积的类金刚石薄膜的喇曼光谱表征

汪俊, 温小琼, 尹利勇, 王德真

(大连理工大学物理与光电工程学院，三束材料表面改性重点实验室，大连 116023)

收稿日期:2008-03-07 修回日期:2008-09-20 出版日期:2009-03-15 发布日期:2010-05-24
作者简介:汪俊(1984-)，男，安徽人，大连理工大学物理与光电工程学院硕士研究生。
基金资助:
国家自然科学基金资助项目(50307002)

Characterization of Raman spectroscopy of DLC films deposited on inner surface

WANG Jun, WEN Xiao-qiong, YIN Li-yong, WANG De-zhen

(Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024)

Received:2008-03-07 Revised:2008-09-20 Online:2009-03-15 Published:2010-05-24

摘要/Abstract

摘要： 在工作气体采用氩气和甲烷混合气体(4:1)的直流辉光放电中，在工作气压分别为10、20、30和40Pa以及沉积时间分别为10、20和30min下利用等离子体化学气相沉积法在内径10mm长100mm的304不锈钢管内表面制备了类金刚石薄膜，并利用喇曼光谱研究了沉积的工作气压和时间对薄膜微观结构的影响。通过对喇曼谱图进行定量解析发现：随着压强的增加，D峰、G峰位置、两峰峰宽以及其强度比值I_D/I_G都呈先减小后增大趋势，20Pa时达到最低点；随着沉积时间的增加，D峰、G峰位置向低波数端减小，半峰宽减小；D峰、G峰的强度比I_D/I_G减小。定量解析的结果表明，随沉积时间的增加，DLC薄膜中的sp³含量会增多，结构会相对更有序，薄膜中石墨团簇的尺寸会更大。

关键词: 直流辉光等离子体, 类金刚石膜, 喇曼光谱, 工作气压, 沉积时间

Abstract: Diamond-like carbon (DLC) films deposition on inner surface of a stainless steel tube with 100mm in length and 10mm in inner diameter is carried out in direct current glow discharge plasma of Ar/CH4 mixed gas with a flow ratio of 20% CH₄, and the influence of pressure and deposition time on micro-structure of the films is investigated by Raman spectroscopy. It is found that the position of both G and D line, the width (FWHM) of both G and D line and the I_D/I_G ratio all drop firstly and then rise along with the pressure increase, the lowest values occur when the pressure is 20Pa. On the other hand, along with the time evolution the position of both G and D line shift to the lower wave-number, the width (FWHM) and the I_D/I_G ratio of both G and D line decrease. These results reveal that the DLC films become harder, more ordered and more diamond-like with higher sp³ content, and the size of sp³ cluster grows larger along with the time evolution.

Key words: Direct current glow discharge plasma, Diamond-like carbon film, Raman spectra, Working pressure, Deposition time

中图分类号:

O539

汪俊, 温小琼, 尹利勇, 王德真. 内表面沉积的类金刚石薄膜的喇曼光谱表征[J]. 核聚变与等离子体物理, 2009, 29(1): 82-86.

WANG Jun, WEN Xiao-qiong, YIN Li-yong, WANG De-zhen. Characterization of Raman spectroscopy of DLC films deposited on inner surface[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2009, 29(1): 82-86.

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