关键词: 氮气等离子体, 微空心阴极放电, 粒子模拟, 蒙特卡罗模型

Abstract: A two-dimensional PIC/MC model is developed for a hollow cathode discharge in nitrogen. The transition of potential and electric field from conventional hollow cathode discharge to the micro hollow cathode discharge in N₂ is studied. The results showed that the distributions of electric potential and electric field in different sizes of hollow cathode discharge are almost similar, but the electric field linear increases approximately with the hollow cathode diameter decrease and the pressure increase; The electric field in typical micro hollow cathode discharge is about 3 orders of magnitude bigger than in the conventional hollow cathode discharge; The electron, nitrogen molecular ions and nitrogen atoms ion density in the micro hollow cathode discharge is about 3 orders of magnitude bigger than in conventional hollow cathode discharge, and the N₂⁺ density is above 8 times than the N⁺ density in the micro hollow cathode discharge.

Key words: Nitrogen plasma, Micro hollow cathode discharge, Particle-in-cell, Monte Carlo method