用于兆瓦级回旋管的金刚石窗片的研制

doi:10.16568/j.0254-6086.202504003

核聚变与等离子体物理 ›› 2025, Vol. 45 ›› Issue (4): 388-395.DOI: 10.16568/j.0254-6086.202504003

用于兆瓦级回旋管的金刚石窗片的研制

李义锋 1, 2, 3，姜龙 1, 2, 3，安晓明 1, 2, 3，葛新岗 1, 2, 3，张雅淋 1, 2, 3，仝婷婷 1, 2, 3，张平伟 1, 2, 3，刘晓晨 1, 2, 3，唐伟忠 1, 3，郭辉 1, 2, 3，孙振路 1, 2, 3

(1. 河北普莱斯曼金刚石科技有限公司，石家庄 050081；2. 河北省激光研究所有限公司，石家庄 050081；3. 河北省化学气相沉积金刚石重点实验室，石家庄 050081)

收稿日期:2023-12-18 修回日期:2024-02-29 出版日期:2025-12-15 发布日期:2025-12-12
作者简介:李义锋(1987-)，男，河南商丘人，副研究员，博士，从事微波等离子体化学气相沉积金刚石研究。
基金资助:
国家磁约束核聚变能发展研究专项资助(2019YFE03100300)；河北省科学院高层次人才培养与资助项目(2023G22)

Development of diamond disks for megawatt level gyrotron

LI Yi-feng1, 2, 3, JIANG Long1, 2, 3, AN Xiao-ming1, 2, 3, GE Xin-gang1, 2, 3, ZHANG Ya-lin1, 2, 3,Tong Ting-ting1, 2, 3, ZHANG Ping-wei1, 2, 3, LIU Xiao-chen1, 2, 3, Tang Wei-zhong1, 3,GUO Hui1, 2, 3, SUN Zhen-lu1, 2, 3

(1. Hebei Plasma Diamond Technology Co., Ltd., Shijiazhuang 050081;2. Hebei Institute of Laser Co., Ltd., Shijiazhuang 050081;
3. Hebei Key Laboratory of Chemical Vapor Deposition Diamond, Shijiazhuang 050081)

Received:2023-12-18 Revised:2024-02-29 Online:2025-12-15 Published:2025-12-12

摘要/Abstract

摘要： 采用微波等离子体化学气相沉积对兆瓦级回旋管用金刚石微波窗片进行了研制。对影响金刚石窗口性能的耐压强度、热导率、热膨胀系数、介电损耗正切等关键参数进行了表征。实验结果表明，厚度 1 mm、通径 92 mm 的金刚石窗片可承受约 0.47 MPa 的压强；金刚石室温热导率达到 20.1 W·cm⁻¹·℃⁻¹；0.95 mm 厚金刚石窗片介电损耗正切低至 2.7×10⁻⁶。合成了 1.8 mm 厚低微波损耗金刚石窗片并应用于 140/105 GHz 双频回旋管中，在 140 GHz 频率下回旋管实现了 850 kW 的稳定功率输出，窗片损耗约 0.11%；在 105 GHz 频率下实现了 760 kW 的稳定功率输出，窗片损耗约 0.15%。实验数据计算结果表明，研制的 1.8 mm 厚、tanδ=3.8×10⁻⁵ 的金刚石窗片可满足 1.5 MW 长脉冲回旋管的应用需求。

关键词: MPCVD, 兆瓦级微波窗口, 金刚石窗片, 长脉冲大功率回旋管

Abstract: The diamond disks for megawatt level gyrotron have been developed by microwave plasma chemical vapor deposition. Key parameters that affect the performance of diamond windows, such as compressive strength, thermal conductivity, coefficient of thermal expansion and dielectric loss tangent were characterized. The diamond disk with a diameter of 92 mm and a thickness of 1 mm can withstand a pressure of about 0.47 MPa. The thermal conductivity of diamond disk at room temperature reaches 20.1 W·cm⁻¹·℃⁻¹. The tanδ of 0.95 mm thick diamond disk is as low as 2.7×10⁻⁶. Finally, a low-microwave-loss diamond disk with a thickness of 1.8 mm was synthesized under optimized parameters and applied to a 140/105 GHz dual frequency gyrotron. A stable power output of 850 kW was achieved at 140 GHz with a window loss of approximately 0.11% and 760 kW was achieved at 105 GHz with loss of approximately 0.15%. The calculation results indicate that this 1.8mm diamond disk with tanδ=3.8×10⁻⁵ can be used for 1.5 MW long pulse gyrotron.

Key words: Microwave plasma chemical vapor deposition, Megawatt level microwave window, Diamond disk, Long pulse high-power gyrotron

中图分类号:

TL62+2

李义锋, 姜龙, 安晓明, 葛新岗, 张雅淋, 仝婷婷, 张平伟, 刘晓晨, 唐伟忠, 郭辉, 孙振路. 用于兆瓦级回旋管的金刚石窗片的研制[J]. 核聚变与等离子体物理, 2025, 45(4): 388-395.

LI Yi-feng, JIANG Long, AN Xiao-ming, GE Xin-gang, ZHANG Ya-lin, Tong Ting-ting, ZHANG Ping-wei, LIU Xiao-chen, Tang Wei-zhong, GUO Hui, SUN Zhen-lu . Development of diamond disks for megawatt level gyrotron[J]. Nuclear Fusion and Plasma Physics, 2025, 45(4): 388-395.

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用于兆瓦级回旋管的金刚石窗片的研制

Development of diamond disks for megawatt level gyrotron

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