射频等离子体离子能量分布特性研究

doi:10.16568/j.0254-6086.202104003

核聚变与等离子体物理 ›› 2021, Vol. 41 ›› Issue (4): 598-602.DOI: 10.16568/j.0254-6086.202104003

射频等离子体离子能量分布特性研究

邢海龙 1, 2，金伟*2，梁传辉 2，代波 1，任勇 1，毛新春 2，王东平 2，王小英 2，陈长安 2

(1. 西南科技大学，绵阳 621010；2. 中国工程物理研究院材料研究所，绵阳 621908)

收稿日期:2020-03-04 修回日期:2021-01-11 出版日期:2021-12-15 发布日期:2022-01-11
作者简介:邢海龙(1995−)，男，河南平顶山人，学士，从事材料科学与工程研究。
基金资助:
国家自然科学基金(11775194)；国家磁约束核聚变能发展研究专项 (2015GB109001)

Studies on the ion energy distribution of radio-frequency discharges

XING Hai-long1, 2, JIN Wei2, LIANG Chuan-hui2, DAI Bo1, REN Yong1, MAO Xin-chun2, WANG Dong-ping2, WANG Xiao-ying2, CHEN Chan-gan2 #br#

(1. Southwest University of Science and Technology, Mianyang 621010;
2. Institute of Materials, China Academy of Engineering Physics, Mianyang 621908)

Received:2020-03-04 Revised:2021-01-11 Online:2021-12-15 Published:2022-01-11

摘要/Abstract

摘要： 利用质谱仪对不同进气速率下的氩气、氮气及氮-氘混合三种射频感应耦合等离子体的离子能量分布、离子浓度演化进行了研究。实验结果表明，等离子体的离子能量分布呈多峰结构；在功率一定时，纯氩气及氮气离子的峰值能量随进气速率增加向低能端移动，且离子通量密度逐渐降低；而氮-氘混合等离子体生成的氨系离子 ND₄⁺，峰值离子能量随氘气进气速率先降低后上升，通量密度先增大后降低。

关键词: 感应耦合等离子体, 离子能量分布, 进气速率

Abstract: Using a diagnostic system with a spectrometer, ion energy distributions and ion concentration
evolutions of argon, nitrogen and nitrogen-deuterium plasmas induced by radio frequency were studied at
different inlet flow rates. It is found that the plasma ion energy distribution has a multi-energy-peak structure,
peak values and ion flux in argon and nitrogen plasmas with fixed discharge power decrease with the increase of
gas flow rate. Peak energy of ND₄⁺ in nitrogen-deuterium plasma initially decreases and then increases while the
ion flux increases first and then falls down as the increment of extra supplement of deuterium.

Key words: Inductively coupled plasma, Ion energy distribution, Gas flow rate

中图分类号:

O536
TL65

邢海龙, 金伟, 梁传辉, 代波, 任勇, 毛新春, 王东平, 王小英, 陈长安 . 射频等离子体离子能量分布特性研究[J]. 核聚变与等离子体物理, 2021, 41(4): 598-602.

XING Hai-long, , JIN Wei, LIANG Chuan-hui, DAI Bo, REN Yong, MAO Xin-chun, WANG Dong-ping, WANG Xiao-ying, CHEN Chan-gan . Studies on the ion energy distribution of radio-frequency discharges [J]. Nuclear Fusion and Plasma Physics, 2021, 41(4): 598-602.

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射频等离子体离子能量分布特性研究

Studies on the ion energy distribution of radio-frequency discharges

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