常压双频驱动Ar/CCl4 等离子体射流制备碳薄膜的研究
张亚东，袁强华，殷桂琴*，王 勇，李 洋
Investigation of the carbon films by Ar/CCl4 plasma jet driven with dual-frequency power under atmospheric pressure
ZHANG Ya-dong, YUAN Qiang-hua, YAN Gui-qin, WANG Yong, LI Yang
核聚变与等离子体物理
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2019, (1): 89
-96
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DOI: 10.16568/j.0254-6086.201901014
